Brooks SLA5853SSLA5853S2GAB2C2A1

SLA5853 Mass Flow Controller N2 600 NLPM SLA5853 REV B Mass Flow Controller Max Press 1000 psig [69 BAR] Max Temperature 149F [65C] Temperature 20C Meter Material 316L SS Valve Type NC High DP Valve Seat Viton (Viton Diaphragm) O-Ring Viton Elect Conn 15-pin D-Conn Proc Conn Sz 1/2-in Conn Type FNPT Fs Flow Rate 600 NLPM Gas N2 Inl Pressure 13 barg Out Pressure 3 barg Cal Ref Temp 0C Input Signal 4-20mA Output Sig 4-20mA Comm Smart Emulation Baudrate 19200 OutputEnh Std Response PwrSplyIn 24 Vdc Cert Safe Area Mtg Att [1] Horizontal base down Calibration [B] Standard Calibration Oem Cust Standard Brooks label Orifice Size 0.028 Restrictor Type LFE Restrictor Size Size code D N2 E. Gas Factor 1 N2_EQ 600 NLPM CRN Province N/A RT Aux Input N/A Viscosity 0.0178 Density 0.0161 GM/CC Specific Heat 1.0401 J/g K